Webb1 okt. 2024 · Growth parameters of GaN thin film have been studied based on different flow rate of sputtering gasses, chamber pressure, sputtering power, substrate temperature … Webbsimilar to those used to grow a-plane GaN films onr-plane sapphire substrates were employed, namely a surface tem-perature of ;1100°C and a V/III ratio of 740~see Ref. 3!. To investigate the microstructural evolution of nonpolar GaN, a series of growths was performed with the GaN film thickness ranging from 0 to 1 mm. The film thickness …
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SMALL-GAN: SPEEDING UP GAN TRAINING USING CORE-SETS
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